Greene Tweed has announced the introduction of Chemraz® 663, a new compression-molded perfluroroelastomer (FFKM), engineered to withstand low-temperature Etch and Deposition applications where plasma resistance and maintaining sealing force in a vacuum are critical, such as electrostatic chuck (ESC) assemblies. With its low-temperature operating capacity (as low as -40°C/-40°F) and high purity (trace metal content less than 20,000 ppb), Chemraz® 663 is an ideal choice for ESC applications...